Angstrom Advanced AA8000 Multi-function SEM System

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Angstrom Advanced AA8000 Multi-function SEM System

Introductions
Angstrom Advanced AA8000 SEM is a true multi-purpose, multi-user instrument. It excels in versatility and flexibility by combining high performance in all SEM modes & Particle counter with ease of operation in a multi-user material research environment. This instrument features a perfect balance between stable configuration and an excellent resolution. Angstrom Advanced SEM clearly shows Angstrom’s state-of-art technology. Its rock-solid reliability and fully automated control functions provide customer with the maximum analytical capability. Angstrom Advanced SEM pursues compact SEM design which is great for office environment. Angstrom-SEM provides high scan speed and pixel resolution and high performance control driver with new PCI board. A full set of automated image adjustment functions make it easy for new users to quickly acquire crisp, noise-free images. Even experienced users will benefit from the automated contrast, brightness and focus. Our goal is to provide our customers with the best products with highest standard of service at cost efficient pricing
Features

High Performance

  • Field proven image quality
  • Upgraded scan speed and pixel resolution.
  • Wide variety of optional instrument
  • Resolution : 3.0 nm
  • Magnification : ~1,000,000X
  • Display : Photo 4096 x 4096
  • Search : 640 x 480 30fps
  • Options : BSE / WDS / EDS / EBSD / Etc.

Gun Coumn

  • Gun design for stable current supply
  • Dual field objective lens for spherical
  • Aberration reduction
  • Movable aperture for beam centering
  • Upgraded design of magnetic lens (CL/OL)

Chamber & Stage

  • 5 axis eucentric stage
  • Option: Stage motorization
  • EDS,WDS,CCD, Manipulator etc
  • 50X60X57mm

Detector

  • ET-bar type SE detector
  • SE & BSE double image mode
  • Option: BSE detector

GUI

  • Window based GUI
  • PC controlled operation
  • Image thumbnail & storage
  • Parameter Display

Vacuum System

  • Automatic & Manual control
  • Automatic Safety System
  • R.P+D.P/ R.P+TMP

Image Analyzer

    • Data transfer to Excel
    • Particle counter for blob analysis
    • Multi-focusing & Tiling
    • 3D data view etc

Specifications

Z ELECTRON OPTIC SYSTEM
Resolution 3.0 nm @30KeV SE/ 4.0nm @BSE
Magnification 10 ~ 1,000,000X
Image Color Optical Microscope Image (Option)
Beam Scan Mode Search, Inspection, Photo (3step)
Accelerating Voltage 0.5kV~30kV
Electron Gun Type Tungsten Filament
Bias System Linked with Acc. Voltage plus continuous voltage control
Gun Alignment Pre-centered cartridge
Condenser Lens Electromagnetic 2 stages
Objective Lens Electromagnetic 1 stages
Stigmator 8 Pole Electromagnetic Type
Detector Bar Type SE Detector (SE-BSE Conversion Mode Without BSE detector for Non-coating sample inspection)
Image Shift 4 Pole Electromagnetic Type
Automation Function Auto-Focus, Auto-Stigmatism, Auto Contrast/Brightness, Emission Current etc.
DISPLAY
Frame Memory &Scan Search (640X480) >30 frame/sInspection (1280X960)  30 frame/sPhoto(4096X4096)  2 frame/s
IMAGE ANALYZER
Image Analyzer Particle Counter Multi-Focusing/ Image Tiling/ 3D-View/Enhancement/ Color Transformation/Filters/ Blob Analysis (Single/Multiple/Grouping), Histogram, Excel Data, Point Measurement
STAGE SYSTEM
Movement (X/Y/Z) mm 50/ 60/ 57mm
Tilt -30~60° (Max 90 °)
Rotation 360°
Stage Motorization X,Y,R (Standard) X,Y,Z,Tilt,Rotation (Option)
VACUUM SYSTEM
Vacuum Control Type Full automation with safety system
Vacuum System Rotary Pump + Diffusion Pump or Rotary Pump + Turbo Pump (Option)
CONTROL SYSTEM
Computer System Intel Pentium 4(Dual Co-Processor)
Memory ≥ 256MB, Control Data Interface
Operation System Image Acquisition
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